MEMS Differential Pressure Sensor Die

Description

The NSP1830 series MEMS differential pressure sensors by Novosense are high-performance and high-reliability sensor dies designed for measuring differential pressure. Here are the key features and specifications of the NSP1830 series:

Features:

1. Monocrystalline Silicon High Sensitivity Piezoresistive Effect: These sensors are based on the principle of monocrystalline silicon high sensitivity piezoresistive effect, which ensures accurate pressure measurement.
2. Advanced MEMS Technology: The sensors are manufactured using advanced MEMS (Micro-Electro-Mechanical Systems) technology, which allows for high precision and reliability.
3. AEC-Q103 Qualified: The NSP1830 series sensors are qualified according to AEC-Q103, which is a standard for automotive electronic components. This qualification ensures that the sensors meet the stringent requirements of the automotive industry.
4. High Accuracy and Stability: These sensors guarantee accuracy and stability better than 1% FS (Full Scale) throughout their overall lifetime. This level of accuracy is crucial for many applications.
5. Multiple Pressure Ranges: The typical pressure ranges available for these sensors are 0±100kPa and 0500kPa, making them suitable for a wide range of applications with varying pressure requirements.
6. Wide Range of Applications: The NSP1830 series sensors find applications in various industries, including consumer electronics, medical electronics, industrial controls, and automotive electronics. They can be used in applications such as pressure monitoring, control systems, and more.
7. Optional Bonded Glass Substrate: An optional bonded glass substrate is available to further improve sensor stability. This substrate enhances the long-term performance of the sensors.
8. Quality Assurance: The wafer manufacturing platform for these sensors adheres to the International Automotive Standard IATF16949:2016. Each wafer undergoes rigorous inspection, including 100% AOI (Automated Optical Inspection) on both the backside and frontside. Electronic AOI wafer maps are provided for each wafer to ensure quality control.

In summary, the NSP1830 series MEMS differential pressure sensors are designed for high-performance and high-reliability pressure measurement applications. Their accuracy, stability, and qualification according to automotive standards make them suitable for a wide range of industries and applications where precise differential pressure sensing is essential.